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This book provides readers with the fundamentals and principles related to ultrasonic nano/micro fabrication, handling, and driving, the detailed methods of designing devices based on these principles, and characteristics of these devices.

Demands for high-performance micro/nano manipulations, from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, and high-end appliances, have been rapidly increasing in recent years. However, there are very few books on ultrasonic manipulation technology, which is one of the important means in micro/nano manipulations.This unique title gives th...