Plasma Processing of Materials: Scientific Opportunities ...
National Research Council / Division On Engineering And Physical Sci / Commission On Physical Sciences Mathemat Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world?electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses...