The Physical Properties of Thin Metal Films
Zhigal'skii, G P / Jones, Brian K Thin films of conducting materials, such as metals, alloys and semiconductors, are used in many areas of science and technology, particularly in modern integrated circuit microelectronics that require high quality thin films for the manufacture of connection layers, resistors, and ohmic contacts. Physical Properties of Thin Metal Films provides a clear presentation of the complex physical properties particular to thin conducting films and incl...