With particular relevance in the revolutionary field of near-field optics, Fabrication of Silicon Microprobes for Optical Near-Field Applications demonstrates the application of silicon micromachining in fabricating the state-of-the-art optical probes used in the most powerful microscopes. The technology addressed in this reference greatly improves upon the use of optical fibers, which are very fragile and less efficient in dealing with applications that require an array of nano light sources. The book presents several technological approaches for fabricating ultra-small apertures using Si micromachining technology for Atomic Force Microscopy (AFM) and Near-Field Scanning Optical Microscopy (NSOM) probes.