An introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. Addressed to researchers, post-graduates and even engineers with little or no experience, the book reviews the basic concepts related to the interaction of low energy ion beams with materials.
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ISBN | 9781860943515 |
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Sprache | eng |
Cover | Fester Einband |
Verlag | World Scientific Publishing Company |
Jahr | 20030325 |
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